An initial study of on‐line remote system for monitoring of trace metals using the inductively coupled plasma mass spectrometer equipped with dynamic reaction cell system is described. The three types of cleaning solutions (HF, SC‐1 and SC‐2) used in the traditional RCA clean procedure are analyzed periodically with one set of simple calibration curves to simulate the on‐line monitoring. A remote sampling system for on‐line monitoring with the combination of the ICP‐MS is also demonstrated. © 2003 American Institute of Physics