Efficient pulsed microwave excitation of a high‐pressure excimer discharge
作者:
V. Rousseau,
S. Pasquiers,
C. Boisse‐Laporte,
G. Calle`de,
P. Leprince,
J. Marec,
V. Puech,
期刊:
Journal of Applied Physics
(AIP Available online 1992)
卷期:
Volume 71,
issue 11
页码: 5712-5714
ISSN:0021-8979
年代: 1992
DOI:10.1063/1.350507
出版商: AIP
数据来源: AIP
摘要:
We report on a microstrip line structure able to sustain plasmas up to five bars of a He/Xe/HCl mixture, with good stability and reproducibility and without preionization of the mixture. The microwave power coupling has been characterized and the incoherent ultraviolet‐308 nm emission has been studied by means of time‐resolved spectroscopy.
点击下载:
PDF
(402KB)
返 回