High efficiency surface emitting lasers using blazed grating outcouplers
作者:
Mats Hagberg,
Niklas Eriksson,
Anders Larsson,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 67,
issue 25
页码: 3685-3687
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.114927
出版商: AIP
数据来源: AIP
摘要:
Grating coupled surface emitting lasers with rectangular as well as blazed grating outcouplers were investigated. Horizontal cavity InGaAs/AlGaAs laser oscillators, with two rectangular first order surface gratings as feedback elements, were integrated with single detuned rectangular or blazed second order gratings as surface output couplers, using electron beam lithography and chemically assisted ion beam etching. Superior differential quantum and surface emission efficiencies of 56% and 84%, respectively, were measured for lasers with optimized blazed output couplers. ©1995 American Institute of Physics.
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