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Classical stochastic diffusion theory for thermal desorption from solid surfaces

 

作者: Antonio Redondo,   Yehuda Zeiri,   William A. Goddard,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1984)
卷期: Volume 2, issue 3  

页码: 550-560

 

ISSN:0734-211X

 

年代: 1984

 

DOI:10.1116/1.582837

 

出版商: American Vacuum Society

 

关键词: DIFFUSION;SURFACES;INTERFACES;ADSORPTION;DESORPTION;DISSOCIATION;VIBRATIONAL STATES;SORPTIVE PROPERTIES;TEMPERATURE EFFECTS;MATHEMATICAL MODELS;DISSOCIATION ENERGY;FLUIDS

 

数据来源: AIP

 

摘要:

As a first step in the microscopic study of dynamic processes on surfaces and at interfaces, we have considered the thermal desorption of adsorbed species on solid surfaces. We review recent developments based on a classical stochastic diffusion formulation. Using this theory, we obtained a simple rate expression,R=(Ω0/2π)f(T)exp(−De/kT), where Ω0is the surface‐adsorbate vibrational frequency andDethe dissociation energy. For atomsf(T)=1, whereas for moleculesf(T) depends on the parameters for the frustrated rotations at the surface. The effect of coverage on the rate of desorption and the process of desorption into a fluid are also examined. Finally, we discuss the relationship between our theory and the expressions obtained from activated complex (transition‐state) theory.

 

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