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Method of separating hysteresis effects from MIS capacitance measurements

 

作者: T. Nakagawa,   H. Fujisada,  

 

期刊: Applied Physics Letters  (AIP Available online 1977)
卷期: Volume 31, issue 5  

页码: 348-350

 

ISSN:0003-6951

 

年代: 1977

 

DOI:10.1063/1.89695

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new method is proposed to estimate interface state density in hysteretic MIS devices. In this method, a narrow bias‐voltage swing is applied around a certain center bias voltage to obtain a narrowC‐Vcurve without hysteresis. It is shown that the capacitance derivative obtained in this way depends on MIS capacitance only, and then can be used for determining the interface state density in the hysteretic InSb MIS devices.

 

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