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V-groove isolated b.i.f.e.t. technology for micropower i.c.s

 

作者: S.D.S.Malhi,   C.A.T.Salama,  

 

期刊: IEE Proceedings I (Solid-State and Electron Devices)  (IET Available online 1980)
卷期: Volume 127, issue 4  

页码: 169-175

 

年代: 1980

 

DOI:10.1049/ip-i-1.1980.0036

 

出版商: IEE

 

数据来源: IET

 

摘要:

This paper describes a V-groove isolated b.i.f.e.t. technology suitable for micropower integratedcircuit fabrication. The V-groove isolation technique offers considerable advantages in area and performance over standard junction isolated technology. The technology provides an ideal combination of active elements which include low pinchoff j.f.e.t.s and bipolar transistors. The characteristics of the devices as well as typical applications of the technology are described.

 

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