Threshold shifting in pseudomorphic semiconductor‐insulator‐semiconductor heterostructure field‐effect transistors
作者:
S. L. Wright,
P. M. Solomon,
H. Baratte,
D. C. LaTulipe,
T. N. Jackson,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 58,
issue 20
页码: 2285-2287
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.104900
出版商: AIP
数据来源: AIP
摘要:
Pseudomorphic (In,Ga)As layers are used in GaAs‐based semiconductor‐insulator‐ semiconductor (SIS) structures to shift the threshold voltage from the natural, near‐zero value. The threshold voltage is shifted positively for (In,Ga)As gate layers, and negatively for (In,Ga)As channel layers, by the (In,Ga)As/GaAs conduction‐band offset. The thermionic and field emission barrier heights agree with shifts obtained in capacitance‐voltage characteristics. The structures withstand implant activation anneals, establishing a simple technology to create either enhancement or depletion‐mode devices.
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