Formation of apnjunction on an anisotropically etched GaAs surface using metalorganic chemical vapor deposition
作者:
R. P. Leon,
S. G. Bailey,
G. A. Mazaris,
W. D. Williams,
期刊:
Applied Physics Letters
(AIP Available online 1986)
卷期:
Volume 49,
issue 15
页码: 945-947
ISSN:0003-6951
年代: 1986
DOI:10.1063/1.97491
出版商: AIP
数据来源: AIP
摘要:
A continuousp‐type GaAs epilayer has been deposited on ann‐type sawtooth GaAs surface using metalorganic chemical vapor deposition. A wet chemical etching process was used to expose the intersecting (111)Ga and (1¯1¯1)Ga planes with 6 &mgr;m periodicity. Charge collection microscopy was used to verify the presence of thepnjunction thus formed and to measure its depth. The ultimate goal of this work is to fabricate a V‐groove GaAs cell with improved absorptivity, high short‐circuit current, and tolerance to particle radiation.
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