首页   按字顺浏览 期刊浏览 卷期浏览 Formation of apnjunction on an anisotropically etched GaAs surface using metalorganic c...
Formation of apnjunction on an anisotropically etched GaAs surface using metalorganic chemical vapor deposition

 

作者: R. P. Leon,   S. G. Bailey,   G. A. Mazaris,   W. D. Williams,  

 

期刊: Applied Physics Letters  (AIP Available online 1986)
卷期: Volume 49, issue 15  

页码: 945-947

 

ISSN:0003-6951

 

年代: 1986

 

DOI:10.1063/1.97491

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A continuousp‐type GaAs epilayer has been deposited on ann‐type sawtooth GaAs surface using metalorganic chemical vapor deposition. A wet chemical etching process was used to expose the intersecting (111)Ga and (1¯1¯1)Ga planes with 6 &mgr;m periodicity. Charge collection microscopy was used to verify the presence of thepnjunction thus formed and to measure its depth. The ultimate goal of this work is to fabricate a V‐groove GaAs cell with improved absorptivity, high short‐circuit current, and tolerance to particle radiation.

 

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