A general analytic technique for nonlinear dynamic transport processes during laser annealing
作者:
Dae M. Kim,
Rajiv R. Shah,
D. Lloyd Crosthwait,
期刊:
Journal of Applied Physics
(AIP Available online 1980)
卷期:
Volume 51,
issue 6
页码: 3121-3125
ISSN:0021-8979
年代: 1980
DOI:10.1063/1.328101
出版商: AIP
数据来源: AIP
摘要:
We present an approximate analytic technique capable of describing the dynamics of nonlinear heat and mass diffusion. The technique is based on using adiabatic approximation in the Green’s‐function formulation and is illustrated for the case of heat transport during pulsed and cw laser annealing of Si. In particular, the heating efficiency is discussed explicitly as a function of pulse intensity for a fixed pulse energy.
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