Thin film coating techniques on wires and inner walls of small tubes via cylindrical magnetron sputtering

 

作者: Youichi Hoshi,   Masahiko Naoe,   Shun'Ichi Yamanaka,  

 

期刊: Electrical Engineering in Japan  （WILEY Available online 1983）
卷期: Volume 103, issue 1  

页码: 16-22

 

ISSN:0424-7760

 

年代: 1983

 

DOI:10.1002/eej.4391030104

 

出版商: Wiley Subscription Services, Inc., A Wiley Company

 

数据来源: WILEY

 

 

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