Preferential sputtering of binary alloys with diffusion: The equilibrium distribution
作者:
R. Collins,
期刊:
Radiation Effects
(Taylor Available online 1978)
卷期:
Volume 37,
issue 1-2
页码: 13-19
ISSN:0033-7579
年代: 1978
DOI:10.1080/00337577808242082
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
The preferential sputtering of a binary alloy is considered using diffusion theory. It is shown that this leads to non-linear-terms in both the bulk diffusion equation and the boundary conditions. The steady-state solution is investigated in detail, and the results indicate that some of the non-linearities are negligible, while others cannot be omitted without appreciable errors. The surface depletion of the more volatile component is much smaller than earlier diffusion studies had suggested.
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