Development of a multitask and multiinstrument sample transfer system
作者:
S. Thevuthasan,
D. R. Baer,
M. H. Englehard,
Y. Liang,
J. N. Worthington,
T. R. Howard,
J. R. Munn,
K. S. Rounds,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1995)
卷期:
Volume 13,
issue 4
页码: 1900-1905
ISSN:1071-1023
年代: 1995
DOI:10.1116/1.587832
出版商: American Vacuum Society
关键词: ULTRAHIGH VACUUM;VACUUM SYSTEMS;SAMPLE CHANGERS;DESIGN;PERFORMANCE TESTING;TEMPERATURE RANGE 0065−0273 K;TEMPERATURE RANGE 0273−0400 K;TEMPERATURE RANGE 0400−1000 K;TEMPERATURE RANGE 1000−4000 K
数据来源: AIP
摘要:
A multiinstrument, multitask UHV sample transfer system being developed for integration with a wide range of synthesis and analysis instruments is described. The specimen transfer capability allows a sample to be synthesized, processed, and characterized by several surface science techniques without exposing the sample to air. Although several types of transfer systems now exist, no existing system has the range of operation desired for a user facility which will be equipped with a wide range of vacuum and controlled atmosphere‐based techniques. Three different kinds of sample platens, which can be used in ambient, high‐temperature, and surface chemistry experiments, have been designed and tested. The temperature range of the specimen can be as high as 2000 K during heating and as low as 150 K during cooling.
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