Nanometer table-top proximity x-ray lithography with liquid-target laser-plasma source
作者:
L. Malmqvist,
A. L. Bogdanov,
L. Montelius,
H. M. Hertz,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1997)
卷期:
Volume 15,
issue 4
页码: 814-817
ISSN:1071-1023
年代: 1997
DOI:10.1116/1.589490
出版商: American Vacuum Society
关键词: X-RAY EQUIPMENT;LASER-PRODUCED PLASMA;EMISSION SPECTRA;CARBON FLUORIDES;MASKING;ETCHING;JETS
数据来源: AIP
摘要:
A compact laser-plasma proximity x-ray lithography system suitable for laboratory-scale low-volume nanometer patterning is presented. The laser-plasma source, which is based on a fluorocarbon liquid-jet target, generates high-brightnessλ=1.2–1.7 nmx-ray emission with only negligible debris production. TheAu/SiNxx-ray mask is fabricated by employing ion milling and a high-contrast e-beam resist. With SAL-601 chemically enhanced resist we demonstrate fabrication of high-aspect-ratio, sub-100 nm structures. The exposure time is currently 20 min using a compact 10 Hz,λ=532 nm,70 mJ/pulse mode-locked Nd:YAG laser. However, the regenerative liquid-jet target is designed for operation with future, e.g., 1000 Hz, lasers resulting in projected exposure times of∼10 s.
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