Reduced bias growth of pure-phase cubic boron nitride
作者:
Dmitri Litvinov,
Roy Clarke,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 14
页码: 1969-1971
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.119429
出版商: AIP
数据来源: AIP
摘要:
We report results on an improved growth process for cubic boron nitride (c-BN) films. The films are deposited on a dc-biased silicon substrate using ion-assisted sputtering. First, we grow a BN template layer at a bias voltage which maximizes thesp3content. After this template layer attains a thickness of ∼500 Å, corresponding to the coalescence of the mosaiclike grain structure, we find that we can reduce the substrate bias to about 50&percent; of its initial value while sustaining pure phase c-BN growth. The reduction in nitrogen ion energy results in a dramatic increase in the growth rate as well as significantly improved film quality. ©1997 American Institute of Physics.
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