Analysis of preferred orientations in PST and PZT thin films on various substrates
作者:
D. Chateigner,
H.-R. Wenk,
A. Patel,
M. Todd,
D.J. Barber,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1998)
卷期:
Volume 19,
issue 1-4
页码: 121-140
ISSN:1058-4587
年代: 1998
DOI:10.1080/10584589808012699
出版商: Taylor & Francis Group
关键词: Ferroelectrics;texture;thin films;PST;PZT;orientation distribution
数据来源: Taylor
摘要:
Orientation distributions of Pb(Zr, Ti)O3and Pb2ScTaO6thin films deposited on various substrates and buffer layers are described. All observed textures are basically fibre textures. Only PST films deposited onshow a weak in-plane alignment, with ⟨100⟩ PST perpendicular to the film surface. PST films deposited on a Pt/(100)-Si substrate exhibit strong ⟨111⟩ fibre texute, tilted 5° to the normal. The Pt substrate has also a ⟨111⟩ fibre texture, with orientation densities as high as 60 times the random distribution (m.r.d.). On both substrates, PST films show maxima in the orientation distribution near 35 m.r.d.
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