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Analysis of preferred orientations in PST and PZT thin films on various substrates

 

作者: D. Chateigner,   H.-R. Wenk,   A. Patel,   M. Todd,   D.J. Barber,  

 

期刊: Integrated Ferroelectrics  (Taylor Available online 1998)
卷期: Volume 19, issue 1-4  

页码: 121-140

 

ISSN:1058-4587

 

年代: 1998

 

DOI:10.1080/10584589808012699

 

出版商: Taylor & Francis Group

 

关键词: Ferroelectrics;texture;thin films;PST;PZT;orientation distribution

 

数据来源: Taylor

 

摘要:

Orientation distributions of Pb(Zr, Ti)O3and Pb2ScTaO6thin films deposited on various substrates and buffer layers are described. All observed textures are basically fibre textures. Only PST films deposited onshow a weak in-plane alignment, with ⟨100⟩ PST perpendicular to the film surface. PST films deposited on a Pt/(100)-Si substrate exhibit strong ⟨111⟩ fibre texute, tilted 5° to the normal. The Pt substrate has also a ⟨111⟩ fibre texture, with orientation densities as high as 60 times the random distribution (m.r.d.). On both substrates, PST films show maxima in the orientation distribution near 35 m.r.d.

 

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