Controlled growth of 3C‐SiC and 6H‐SiC films on low‐tilt‐angle vicinal (0001) 6H‐SiC wafers
作者:
J. A. Powell,
J. B. Petit,
J. H. Edgar,
I. G. Jenkins,
L. G. Matus,
J. W. Yang,
P. Pirouz,
W. J. Choyke,
L. Clemen,
M. Yoganathan,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 59,
issue 3
页码: 333-335
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.105587
出版商: AIP
数据来源: AIP
摘要:
We have found that, with proper pregrowth surface treatment, 6H‐SiC single‐crystal films can be grown by chemical vapor deposition (CVD) at 1450 °C on vicinal (0001) 6H‐SiC with tilt angles as small as 0.1°. Previously, tilt angles of greater than 1.5° were required to achieve 6H on 6H at this growth temperature. In addition, 3C‐SiC could be induced to grow within selected regions on the 6H substrate. The 3C regions contained few (or zero) double‐positioning boundaries and a low density of stacking faults. A new growth model is proposed to explain the control of SiC polytype in this epitaxial film growth process.
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