Composition of rf‐sputtered refractory compounds determined by x‐ray photoelectron spectroscopy
作者:
Donald R. Wheeler,
William A. Brainard,
期刊:
Journal of Vacuum Science and Technology
(AIP Available online 1978)
卷期:
Volume 15,
issue 1
页码: 24-30
ISSN:0022-5355
年代: 1978
DOI:10.1116/1.569431
出版商: American Vacuum Society
数据来源: AIP
摘要:
rf‐sputtered coatings of CrB2, MoSi2, Mo2C, TiC, and MoS2were examined by x‐ray photoelectron spectroscopy (XPS). Data on stoichiometry, impurity content, and chemical bonding were obtained. The influences of sputtering target history, deposition time, rf power level, and substrate bias were studied. Significant deviations from stoichiometry and high oxide levels were related to target outgassing. The effect of substrate bias depended on the particular coating material studied.
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