Experimental characterization of a hydrogen/argon cascaded arc plasma source
作者:
Zhou Qing,
M. J. de Graaf,
M. C. M. van de Sanden,
D. K. Otorbaev,
D. C. Schram,
期刊:
Review of Scientific Instruments
(AIP Available online 1994)
卷期:
Volume 65,
issue 4
页码: 1469-1471
ISSN:0034-6748
年代: 1994
DOI:10.1063/1.1144949
出版商: AIP
数据来源: AIP
摘要:
A H2/Ar cascaded arc plasma source has been experimentally characterized by determination of the efficiency, the electric field, and the pressure gradient of the arc. The results show that the efficiency of a H2/Ar cascaded arc drops when the hydrogen flow rate is increased. The electron temperature in the argon cascaded arc has been derived to be in the range 9000–12 500 K. For a hydrogen arc, the mass dissociation degree of hydrogen molecules has been derived to be above 60%.
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