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Experimental characterization of a hydrogen/argon cascaded arc plasma source

 

作者: Zhou Qing,   M. J. de Graaf,   M. C. M. van de Sanden,   D. K. Otorbaev,   D. C. Schram,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1994)
卷期: Volume 65, issue 4  

页码: 1469-1471

 

ISSN:0034-6748

 

年代: 1994

 

DOI:10.1063/1.1144949

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A H2/Ar cascaded arc plasma source has been experimentally characterized by determination of the efficiency, the electric field, and the pressure gradient of the arc. The results show that the efficiency of a H2/Ar cascaded arc drops when the hydrogen flow rate is increased. The electron temperature in the argon cascaded arc has been derived to be in the range 9000–12 500 K. For a hydrogen arc, the mass dissociation degree of hydrogen molecules has been derived to be above 60%.

 

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