Reduced aberrations in an electron matrix lens through the use of offset apertures
作者:
Kenji Kurihara,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1986)
卷期:
Volume 4,
issue 5
页码: 1251-1255
ISSN:0734-211X
年代: 1986
DOI:10.1116/1.583490
出版商: American Vacuum Society
关键词: ELECTROSTATIC LENSES;DESIGN;BEAM OPTICS;ELECTRON BEAMS;GEOMETRICAL ABERRATIONS
数据来源: AIP
摘要:
A design method for a low aberration matrix lens is developed. The matrix lens consists of an electrostatic lens array and beam limiting aperture array located outside of the lens array. It is shown that off‐axial aberrations, which are dominant in the outer lenses, can be reduced by shifting the aperture from the optical axis of each lens to its optimum position. Using this aperture shift effect, a low aberration matrix lens consisting of einzel lenses is designed for submicron electron beam exposure systems. An aberration of 0.1 μm is predicted for a 40 mm2matrix lens with a beam half‐angle of 5 mrad.
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