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Photoluminescence study on twentyGaAs/Al0.3Ga0.7Astilted T-shaped quantum wires fabricated by glancing-angle molecular beam epitaxy

 

作者: N. Tomita,   K. Takekawa,   K. Ohta,   S. Shimomura,   S. Hiyamizu,   K. Fujita,   N. Egami,   Y. Okamoto,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1998)
卷期: Volume 16, issue 2  

页码: 575-577

 

ISSN:1071-1023

 

年代: 1998

 

DOI:10.1116/1.589866

 

出版商: American Vacuum Society

 

关键词: (Al,Ga)As

 

数据来源: AIP

 

摘要:

TwentyGaAs/Al0.3Ga0.7As tilted T-shaped quantum wires (T-QWRs) on a (111)B facet were uniformly fabricated with a two-step growth of molecular beam epitaxy (MBE), which consists of a glancing-angle MBE ofGaAs/Al0.3Ga0.7As multi-quantum well layer with 20 GaAs wells (a well width ofLw=6.1 nm) on reverse-mesa stripes on a (001) GaAs substrate and MBE overgrowth of aGaAs/Al0.3Ga0.7Assingle-quantum well withLw=6.3 nmon a (111)B facet. Full width at half maximum of a photoluminescence peak(λ=792 nm)from the tilted T-QWRs was as small as 8.7 meV at 28 K, which is comparable with those (6 meV,Reference 5 10 meVReference 10) of conventionalGaAs/Al0.3Ga0.7As T-QWRs (6.8 nm/5.8 nm, 7 nm/7 nm) fabricated by the cleaved-edge overgrowth.

 

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