Investigations of the 147 nm radiative efficiency of Xe surface wave discharges
作者:
N. D. Gibson,
U. Kortshagen,
J. E. Lawler,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 81,
issue 3
页码: 1087-1092
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.363851
出版商: AIP
数据来源: AIP
摘要:
The radiative efficiency of the 147 nm resonance radiation of Xe excited in a low pressure, high-frequency surface wave sustained plasma has been investigated. The radiative UV power has been obtained from optical absorption spectroscopic measurements of the Xe resonance level population and from Monte Carlo calculations of the effective decay rate of this level. Precise measurements of the rf power absorbed by the plasma enable the determination of the absolute vacuum ultraviolet discharge efficiency for the Xe surface wave discharge. Results show efficiencies up to more than 80(±11)&percent; . ©1997 American Institute of Physics.
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