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High‐current and thermal‐shock testing of TaSi2–polycide/Al‐alloy composites

 

作者: T. J. Faith,   R. S. Irven,   E. P. Bertin,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1985)
卷期: Volume 3, issue 5  

页码: 1332-1339

 

ISSN:0734-211X

 

年代: 1985

 

DOI:10.1116/1.582989

 

出版商: American Vacuum Society

 

关键词: ELECTRIC CURRENTS;ELECTRIC CONDUCTIVITY;ELECTRICAL TESTING;MATERIALS TESTING;FAILURES;STRESSES;THERMOMECHANICAL TREATMENTS;CONTACT POTENTIAL;SILICIDES;TANTALUM SILICIDES;ALUMINIUM ALLOYS;ELECTRIC CONTACTS;SHOCK WAVES;TaSi2;Si;Al

 

数据来源: AIP

 

摘要:

High‐current failure levels of TaSi2–polycide/Al‐alloy bilevel‐conductor composites were measured using 10 min increment step‐stress tests. Al‐alloy metallizations were Al and Al–1%Si; polycide and metal linewidths ranged from 2.5 to 3.0 μm; and interlevel‐contact sizes ranged from 1.5 to 2.0 μm2. In all cases, the weak links in the bilevel composite were the interlevel contacts. In units with contact resistances less than 1 Ω, failures occurred at the positive contact at polycide‐line current densities ≥1.4×107A/cm2, which resulted in Joule heating of the polycide line to ≥400 °C. Polycide line damage and Al, which had migrated in the direction of the electric field, often extended to distances>100 μm from the failed contact. Early failures, highly localized at the negative contact, were consistently experienced by units with initial contact resistances above approximately 1 Ω. The failure levels decreased (to current densities as low as 5×106A/cm2) with increasing initial contact resistance. Thirty cycles of thermal shock (−70 to +100 °C) resulted in no reduction in the current level at which high‐current failure occurred in units with good contacts.

 

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