Enhancement of deep acceptor activation in semiconductors by superlattice doping
作者:
E. F. Schubert,
W. Grieshaber,
I. D. Goepfert,
期刊:
Applied Physics Letters
(AIP Available online 1996)
卷期:
Volume 69,
issue 24
页码: 3737-3739
ISSN:0003-6951
年代: 1996
DOI:10.1063/1.117206
出版商: AIP
数据来源: AIP
摘要:
The thermal activation of acceptors in wide‐gap semiconductors can be very low due to large acceptor activation energies. It is shown that superlattice doping, i.e., the composition modulation of a uniformly doped ternary semiconductor, can enhance the acceptor activation by more than one order of magnitude. ©1996 American Institute of Physics.
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