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Sodium halide sputtering by H+, He+, Ar+ions

 

作者: J.P. Biersack,   E. Santner,  

 

期刊: Radiation Effects  (Taylor Available online 1982)
卷期: Volume 64, issue 1-4  

页码: 97-97

 

ISSN:0033-7579

 

年代: 1982

 

DOI:10.1080/00337578208222996

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

Sputtering experiments were performed with 70 to 300 keV H+, He+and Ar+ions impinging on KC1, KBr and Kl. The alkali halide samples are prepared as polycrystalline layers of about 2500 Å thickness, deposited on carbon-aluminium backings. During the ion bombardment the targets are kept at elevated temperatures between 50 and 300°C, in order to study the temperature dependence of sputtering. During the irradiation the removal of halogen and sodium is simultaneously observed by Rutherford backscattering.

 

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