Sodium halide sputtering by H+, He+, Ar+ions
作者:
J.P. Biersack,
E. Santner,
期刊:
Radiation Effects
(Taylor Available online 1982)
卷期:
Volume 64,
issue 1-4
页码: 97-97
ISSN:0033-7579
年代: 1982
DOI:10.1080/00337578208222996
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
Sputtering experiments were performed with 70 to 300 keV H+, He+and Ar+ions impinging on KC1, KBr and Kl. The alkali halide samples are prepared as polycrystalline layers of about 2500 Å thickness, deposited on carbon-aluminium backings. During the ion bombardment the targets are kept at elevated temperatures between 50 and 300°C, in order to study the temperature dependence of sputtering. During the irradiation the removal of halogen and sodium is simultaneously observed by Rutherford backscattering.
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