A sensitive detection method for capacitive ultrasonic transducers
作者:
A. S. Ergun,
A. Atalar,
B. Temelkuran,
E. O¨zbay,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 72,
issue 23
页码: 2957-2959
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.121506
出版商: AIP
数据来源: AIP
摘要:
We report a sensitive detection method for capacitive ultrasonic transducers. Detection experiments at 1.6 MHz reveal a minimum detectable displacement around2.5×10−4 Å/Hz.The devices are fabricated on silicon using surface micromachining techniques. We made use of microwave circuit considerations to obtain a good displacement sensitivity. Our method also eliminates the dependence of the sensitivity on the ultrasound frequency, allowing the method to be used at low audio frequency and static displacement sensing applications. ©1998 American Institute of Physics.
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