首页   按字顺浏览 期刊浏览 卷期浏览 The Ellipsometer, an Apparatus to Measure Thicknesses of Thin Surface Films
The Ellipsometer, an Apparatus to Measure Thicknesses of Thin Surface Films

 

作者: Alexandre Rothen,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1945)
卷期: Volume 16, issue 2  

页码: 26-30

 

ISSN:0034-6748

 

年代: 1945

 

DOI:10.1063/1.1770315

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An apparatus designed to determine the thickness of films deposited on metal slides is described. It is based on the measurement of the change that takes place in ellipticity of the light reflected after a slide has been coated with the film under investigation. The apparatus is capable of measuring a film thickness within ±0.3A, a sensitivity at least ten times greater than that obtained with the method based on light interference.

 

点击下载:  PDF (379KB)



返 回