The electric field and current density in a low-pressure inductive discharge measured with differentB-dot probes
作者:
R. Piejak,
V. Godyak,
B. Alexandrovich,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 81,
issue 8
页码: 3416-3421
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.365026
出版商: AIP
数据来源: AIP
摘要:
The magnitude and relative phase of the time varying magnetic field in an inductively coupled discharge have been measured with twodB/dt(B-dot) probes: OneB-dot probe was enclosed by a dielectric tube (as is commonly used indB/dtmeasurements) while the other, a thin wire probe, was immersed directly into the plasma. Each probe was used to measure the radial and axial component ofdB/dt. A comparison of rf electric fields and currents obtained by the two probes showed essentially different results. The disagreement is interpreted to be due to a large local disturbance of the plasma density and current caused by the dielectric tube. ©1997 American Institute of Physics.
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