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The electric field and current density in a low-pressure inductive discharge measured with differentB-dot probes

 

作者: R. Piejak,   V. Godyak,   B. Alexandrovich,  

 

期刊: Journal of Applied Physics  (AIP Available online 1997)
卷期: Volume 81, issue 8  

页码: 3416-3421

 

ISSN:0021-8979

 

年代: 1997

 

DOI:10.1063/1.365026

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The magnitude and relative phase of the time varying magnetic field in an inductively coupled discharge have been measured with twodB/dt(B-dot) probes: OneB-dot probe was enclosed by a dielectric tube (as is commonly used indB/dtmeasurements) while the other, a thin wire probe, was immersed directly into the plasma. Each probe was used to measure the radial and axial component ofdB/dt. A comparison of rf electric fields and currents obtained by the two probes showed essentially different results. The disagreement is interpreted to be due to a large local disturbance of the plasma density and current caused by the dielectric tube. ©1997 American Institute of Physics.

 

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