Laser‐driven chemical reaction for etching LiNbO3
作者:
C. I. H. Ashby,
P. J. Brannon,
期刊:
Applied Physics Letters
(AIP Available online 1986)
卷期:
Volume 49,
issue 8
页码: 475-477
ISSN:0003-6951
年代: 1986
DOI:10.1063/1.97121
出版商: AIP
数据来源: AIP
摘要:
The first laser‐driven chemical reaction for etching ionic solids based on the fusion of salts in the molten phase is reported here for the reaction of LiNbO3with KF. The process involves spatially localized melting of LiNbO3by high‐power‐density laser pulses with photon energies in excess of the band gap of LiNbO3. While molten, LiNbO3undergoes reaction with KF to form niobium oxyfluoride anions by fusion of the salts. The resulting solid is highly water soluble. The insolubility of LiNbO3permits subsequent removal of only the irradiated area by rinsing in water. This laser‐driven chemical etching process shows great potential for applications which require either smooth surface morphology or very rapid etching rates.
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