High-resolution grazing-incidence x-ray diffraction for characterization of defects in crystal surface layers
作者:
E. A. Kondrashkina,
S. A. Stepanov,
M. Schmidbauer,
R. Opitz,
R. Ko¨hler,
H. Rhan,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 81,
issue 1
页码: 175-183
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.363838
出版商: AIP
数据来源: AIP
摘要:
The peculiarities of high-resolution measurements in grazing-incidence diffraction (GID) are studied, both theoretically and experimentally. It is shown that complete discrimination between coherent reflection and diffuse scattering due to defects in GID requires a three-dimensional mapping of reciprocal space. These measurements can be performed using a combination of analyzer crystal and position-sensitive detector for angular analysis of scattered x-rays in mutually perpendicular planes. The equations for the resolution function of GID experiments are given and applied to the interpretation of GID measurements taken from an AlAs/GaAs superlattice. The discrimination of diffuse scattering due to interfacial roughness in the superlattice is demonstrated. ©1997 American Institute of Physics.
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