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THE ENERGY EFFICIENCY OF LEAD SELF‐SPUTTERING

 

作者: Hans Henrik Andersen,  

 

期刊: Applied Physics Letters  (AIP Available online 1968)
卷期: Volume 13, issue 3  

页码: 85-86

 

ISSN:0003-6951

 

年代: 1968

 

DOI:10.1063/1.1652526

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The sputtering efficiency (i.e. ratio between sputtered energy and impinging ion energy) has been measured for 30–75‐keV lead ions impinging on polycrystalline lead. The results are in good agreement with recent theoretical estimates.

 

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