THE ENERGY EFFICIENCY OF LEAD SELF‐SPUTTERING
作者:
Hans Henrik Andersen,
期刊:
Applied Physics Letters
(AIP Available online 1968)
卷期:
Volume 13,
issue 3
页码: 85-86
ISSN:0003-6951
年代: 1968
DOI:10.1063/1.1652526
出版商: AIP
数据来源: AIP
摘要:
The sputtering efficiency (i.e. ratio between sputtered energy and impinging ion energy) has been measured for 30–75‐keV lead ions impinging on polycrystalline lead. The results are in good agreement with recent theoretical estimates.
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