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Photolithographic patterning of phosphor screens by electrophoretic deposition for field emission display application

 

作者: Sang Won Kang,   Jae Soo Yoo,   Jong Duk Lee,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1998)
卷期: Volume 16, issue 5  

页码: 2891-2893

 

ISSN:1071-1023

 

年代: 1998

 

DOI:10.1116/1.590289

 

出版商: American Vacuum Society

 

关键词: phosphors

 

数据来源: AIP

 

摘要:

The patterning of phosphor screens was carried out using a lithographic technique and electrophoretic deposition of phosphor particles for high-resolution field emission display applications. The electrophoretic deposition and photolithography steps were established. Patterned phosphor screens were fabricated by controlling process parameters such as electrophoretic deposition rate in combination with a well-controlled photoresist process in order to achieve proper pixel size with clear boundaries.

 

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