Photolithographic patterning of phosphor screens by electrophoretic deposition for field emission display application
作者:
Sang Won Kang,
Jae Soo Yoo,
Jong Duk Lee,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1998)
卷期:
Volume 16,
issue 5
页码: 2891-2893
ISSN:1071-1023
年代: 1998
DOI:10.1116/1.590289
出版商: American Vacuum Society
关键词: phosphors
数据来源: AIP
摘要:
The patterning of phosphor screens was carried out using a lithographic technique and electrophoretic deposition of phosphor particles for high-resolution field emission display applications. The electrophoretic deposition and photolithography steps were established. Patterned phosphor screens were fabricated by controlling process parameters such as electrophoretic deposition rate in combination with a well-controlled photoresist process in order to achieve proper pixel size with clear boundaries.
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