Theoretical and experimental characterization of positive‐column plasmas in oxygen glow discharge
作者:
Yukimi Ichikawa,
Richard L. C. Wu,
Teruo Kaneda,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 67,
issue 1
页码: 108-114
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.345288
出版商: AIP
数据来源: AIP
摘要:
Combined theoretical and experimental studies have been accomplished in order to elucidate the features of positive columns in oxygen glow discharges. The Langmuir probe technique was utilized to measure the plasma parameters such as electron temperature and electric field. A tandem mass spectrometer was used to measure relative concentrations of charged particles. These experimental results were found to be in good agreement with the present theoretical calculations based on a slightly ionized stationary plasma model.
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