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Theoretical and experimental characterization of positive‐column plasmas in oxygen glow discharge

 

作者: Yukimi Ichikawa,   Richard L. C. Wu,   Teruo Kaneda,  

 

期刊: Journal of Applied Physics  (AIP Available online 1990)
卷期: Volume 67, issue 1  

页码: 108-114

 

ISSN:0021-8979

 

年代: 1990

 

DOI:10.1063/1.345288

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Combined theoretical and experimental studies have been accomplished in order to elucidate the features of positive columns in oxygen glow discharges. The Langmuir probe technique was utilized to measure the plasma parameters such as electron temperature and electric field. A tandem mass spectrometer was used to measure relative concentrations of charged particles. These experimental results were found to be in good agreement with the present theoretical calculations based on a slightly ionized stationary plasma model.

 

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