LiTaO3thin film from have been obtained by RF-magnetron sputtering from monocrystalline target. The films have been deposited on (111) silicon and platinum without substrate heating. The amorphous films were subsequently annealed in the electric field. The morphology, crystal structure and composition of the films were investigated by means of XRD, SEM and AES spectroscopies. The influence of the annealing treatment in the electric field on the morphology and crystal structure of films is significant. The films grown in this fashion are preferentially oriented with thec-axis perpendicular to the surface of substrates and stoichiometric.