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Scan system for the sextupole‐corrected scanning transmission electron microscopy

 

作者: Shengyang Ruan,   Oscar H. Kapp,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1992)
卷期: Volume 63, issue 9  

页码: 4066-4070

 

ISSN:0034-6748

 

年代: 1992

 

DOI:10.1063/1.1143213

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A computer‐controlled scan system has been completed for a sextupole‐corrected high‐resolution Scanning Transmission Electron Microscope. It is capable of driving 24 coils and 2 sextupoles in the microscope for beam scan, unscan, alignment, and correction of aberration. A PC‐AT is employed to manage this system and control the system devices. By means of these devices the raster size, shape, rotation angle, and dc offset can be controlled by subroutines for image generation/transformation. Computer control provides numerous advantages for the management of such a complicated system making it possible to modify many parameters and invoke a new group of settings simultaneously. This provides convenience in microscope operation for such functions as change in magnification, selection of viewing area, locations of objects of interest and montage.

 

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