Scan system for the sextupole‐corrected scanning transmission electron microscopy
作者:
Shengyang Ruan,
Oscar H. Kapp,
期刊:
Review of Scientific Instruments
(AIP Available online 1992)
卷期:
Volume 63,
issue 9
页码: 4066-4070
ISSN:0034-6748
年代: 1992
DOI:10.1063/1.1143213
出版商: AIP
数据来源: AIP
摘要:
A computer‐controlled scan system has been completed for a sextupole‐corrected high‐resolution Scanning Transmission Electron Microscope. It is capable of driving 24 coils and 2 sextupoles in the microscope for beam scan, unscan, alignment, and correction of aberration. A PC‐AT is employed to manage this system and control the system devices. By means of these devices the raster size, shape, rotation angle, and dc offset can be controlled by subroutines for image generation/transformation. Computer control provides numerous advantages for the management of such a complicated system making it possible to modify many parameters and invoke a new group of settings simultaneously. This provides convenience in microscope operation for such functions as change in magnification, selection of viewing area, locations of objects of interest and montage.
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