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Hardware for digitally controlled scanned probe microscopes

 

作者: S. M. Clark,   D. R. Baselt,   C. F. Spence,   M. G. Youngquist,   J. D. Baldeschwieler,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1992)
卷期: Volume 63, issue 10  

页码: 4296-4307

 

ISSN:0034-6748

 

年代: 1992

 

DOI:10.1063/1.1143728

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The design and implementation of a flexible and modular digital control and data acquisition system for scanned probe microscopes (SPMs) is presented. The measured performance of the system shows it to be capable of 14‐bit data acquisition at a 100‐kHz rate and a full 18‐bit output resolution resulting in less than 0.02‐A˚ rms position noise while maintaining a scan range in excess of 1 &mgr;m in both theXandYdimensions. This level of performance achieves the goal of making the noise of the microscope control system an insignificant factor for most experiments. The adaptation of the system to various types of SPM experiments is discussed. Advances in audio electronics and digital signal processors have made the construction of such high performance systems possible at low cost.

 

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