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Ferroelectric thin films for electronic applications

 

作者: Gene H. Haertling,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1991）
卷期: Volume 9, issue 3  

页码: 414-420

 

ISSN:0734-2101

 

年代: 1991

 

DOI:10.1116/1.577424

 

出版商: American Vacuum Society

 

关键词: REVIEWS;THIN FILMS;DIELECTRIC MATERIALS;USES;FERROELECTRIC MATERIALS;FABRICATION;FILM GROWTH;MEMORY DEVICES;PLZT

 

数据来源: AIP

 

摘要:

This is a review paper on the history of ferroelectric thin films, current practices in their fabrication, characteristics of interest which relate to their use, and the application of these films to memory and electrooptic devices.

 

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