Pulsed-rf excitation of hexafluoropropylene oxide has been used to deposit poly(tetrafluoroethylene)-like thin films. Films were deposited at pulse rates of10/20,10/50,10/200,and10/400 mson/ms off and analyzed using electron spin resonance spectroscopy (ESR). All four films produced similar broad ESR spectra, with an average width at maximum slope of∼60 Gand agvalue of 2.0045. The number of free electrons in a sample decreased with increasing pulse off time. This behavior can be modeled by the reaction of a free radical with a gas species, assuming that free radicals are generated only during the pulse on time. ©1997 American Institute of Physics.