Specific features of field emission from submicron cathode surface areas at high current densities
作者:
G. N. Fursey,
L. M. Baskin,
D. V. Glazanov,
A. O. Yevgen’ev,
A. V. Kotcheryzhenkov,
S. A. Polezhaev,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1998)
卷期:
Volume 16,
issue 1
页码: 232-237
ISSN:1071-1023
年代: 1998
DOI:10.1116/1.589785
出版商: American Vacuum Society
数据来源: AIP
摘要:
Using numerical treatment of experimentally obtained Fowler–Nordheim emission plots, radii of nanotips, formed by the build-up process in strong electric fields on the surface of the tungsten base cathode were determined. It was found that the typical size of such structures depended upon the conditions of their forming and was in the range of 10–50 Å. The field emission characteristics of these emitters for extremely high electric fields and current densitiesJwere studied. Studies of the emission current kinetics from a single nanotip show that atJ>Jblunting∼3–5×109 A/cm2an irreversible change of the tip submicrogeometry—“blunting” of the nanoemitter—takes place. Its apex radius increases 3–5 times. The maximum attainableJvalues from nanotips exceed the values for annealed substrate emitters up to 1 to 2 orders of magnitude. These values range from1010to1011 A/cm2depending on the size, structure, and geometry of tips. The results are presented of numerical simulation of cathode thermal regime, using the heat-transfer equation approach. It has been shown, that the explosive destruction of emitter and initiation of the vacuum breakdown is due not to heating of nanotips by high-density emission currents but to the energy accumulation in the base emitter bulk. The theoretical approach has been developed to the description of energy extraction accompanying the emission from ultrasmall structures (smaller than the free-path length for electron-phonon scattering). It was found that the maximum value of the total emission current was practically constant for emitting object from∼10up to∼50 Åin size.
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