Evaluation of the performance and operating characteristics of a solid phosphorus source valved cracking cell for molecular beam epitaxy growth of III–V compounds
作者:
J. N. Baillargeon,
A. Y. Cho,
R. J. Fischer,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1995)
卷期:
Volume 13,
issue 1
页码: 64-68
ISSN:1071-1023
年代: 1995
DOI:10.1116/1.587987
出版商: American Vacuum Society
关键词: III−V SEMICONDUCTORS;PHOSPHIDES;MOLECULAR BEAM EPITAXY;DESIGN;PERFORMANCE;SUBLIMATION;VAPOR CONDENSATION
数据来源: AIP
摘要:
We studied the performance of a new type of valved cracking cell which contains a separate condensing reservoir and is intended for molecular beam epitaxy of phosphide compounds. The cell was designed to operate with a white phosphorus source, derivedinsituby sublimation and subsequent condensation of red phosphorus vapor. The parameters investigated were stability of the beam flux, switching transients, and growth chamber recovery time. The data show that a properly constructed valved cell, which incorporates a valve where shut‐off and metering are independently controllable, provides for a rapidly switched, stable beam flux with a minimum chamber recovery time. Aninsitugenerated white phosphorus source was found to reduce the P4burst accompanying the use of a red phosphorus source by over 300%.
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