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Optical switching in a metal–semiconductor–metal waveguide structure

 

作者: Amy E. Bieber,   David F. Prelewitz,   Thomas G. Brown,   Richard C. Tiberio,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 66, issue 25  

页码: 3401-3403

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.113367

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We report the observation of all‐optical switching in a metal–semiconductor–metal waveguide structure. A silicon‐on‐insulator waveguide with aluminum interdigitated fingers deposited on the surface and overcoated with amorphous silicon provided high‐efficiency coupling and switching of Nd:YAG laser pulses. This structure is fully compatible with very large scale integrated manufacturing processes and represents a substantial leap forward in the quest for full‐scale integration of silicon‐based optoelectronic systems. ©1995 American Institute of Physics.

 

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