Optical switching in a metal–semiconductor–metal waveguide structure
作者:
Amy E. Bieber,
David F. Prelewitz,
Thomas G. Brown,
Richard C. Tiberio,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 66,
issue 25
页码: 3401-3403
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.113367
出版商: AIP
数据来源: AIP
摘要:
We report the observation of all‐optical switching in a metal–semiconductor–metal waveguide structure. A silicon‐on‐insulator waveguide with aluminum interdigitated fingers deposited on the surface and overcoated with amorphous silicon provided high‐efficiency coupling and switching of Nd:YAG laser pulses. This structure is fully compatible with very large scale integrated manufacturing processes and represents a substantial leap forward in the quest for full‐scale integration of silicon‐based optoelectronic systems. ©1995 American Institute of Physics.
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