Improvement in resolution and reproducibility using the polymethylmethacrylate/polymethylacrylic acid bilayer system

 

作者: Leary Myers,   M. G. Spencer,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  （AIP Available online 1986）
卷期: Volume 4, issue 5  

页码: 1259-1260

 

ISSN:0734-211X

 

年代: 1986

 

DOI:10.1116/1.583492

 

出版商: American Vacuum Society

 

关键词: PHOTORESISTS;RESOLUTION;LITHOGRAPHY;ULTRAVIOLET RADIATION;BILAYERS;PMMA;SPATIAL RESOLUTION;MASKING;MATERIALS;PMMA

 

数据来源: AIP

 

 

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