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Effect of Oxygen Adsorption on Silicon Surface Conductivity

 

作者: F. Wilhelmsen,   J. H. Leck,  

 

期刊: Journal of Vacuum Science and Technology  (AIP Available online 1970)
卷期: Volume 7, issue 1  

页码: 39-42

 

ISSN:0022-5355

 

年代: 1970

 

DOI:10.1116/1.1315822

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

An experimental technique is described for observing the adsorption of oxygen on the surface of a silicon crystal. It is shown that the current flowing in a reverse biasedp-njunction is closely related to the adsorption of oxygen. Observation of this current is used to indicate that sorption obeys first order reaction laws with an initial sticking coefficient of the oxygen on silicon of10−3.

 

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