Vacuum properties of a new panel structure for field emission displays
作者:
Y. R. Cho,
H. S. Kim,
J. D. Mun,
J. Y. Oh,
H. S. Jeong,
S. Ahn,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1998)
卷期:
Volume 16,
issue 6
页码: 3069-3072
ISSN:1071-1023
年代: 1998
DOI:10.1116/1.590344
出版商: American Vacuum Society
数据来源: AIP
摘要:
A new field emission display (FED) panel structure with an auxiliary space was developed in order to increase the conductance of the system for evacuation and help evacuate the cavity inside the FED more effectively. Gas molecules in the main space of the panel can move easily into the auxiliary space through the multiple openings in the base plate and can then be pumped out through the exhaust tube at the auxiliary tank. For the very thin panel, in which the space between the face plate and base plate is 58μm,pressure drop characteristics during evacuation are very sensitive to the number of openings in the base plate. The main purpose of multiple openings in shortening evacuation time is to reduce pressure gradient inside the cavity. Additionally, the auxiliary space makes it easy to place various getters inside the FED panel and to maintain high vacuum for a prolonged lifetime of the FED.
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