Chemical beam epitaxial growth ofGaAs1−xPxon GaAs (100) substrates
作者:
D. Wildt,
B. J. Garcı́a,
J. L. Castaño,
J. Piqueras,
C. J. Pastor,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1998)
卷期:
Volume 16,
issue 4
页码: 1804-1807
ISSN:1071-1023
年代: 1998
DOI:10.1116/1.590091
出版商: American Vacuum Society
关键词: Ga(As,P)
数据来源: AIP
摘要:
Phosphorus incorporation during chemical beam epitaxial (CBE) growth ofGaAs1−xPxfrom triethylgallium, tertiarybutylarsine, and tertiarybutylphosphine is investigated. Reflection high-energy electron diffraction intensity oscillations are used to measure the phosphorus incorporation during the As-limited and the (As+P)-limited growth on a Ga-rich surface. The resulting phosphorus mole fraction is compared with the phosphorus composition measured by x-ray rocking curves on the strainedGaAs1−xPxlayers grown by conventional CBE with a simultaneous supply of group V and group III elements. The phosphorus incorporation rate during CBE growth is lower than that measured during the group V controlled growth but is still much higher than the incorporation rate reported for molecular beam epitaxy growth using elemental sources.
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