Monte Carlo calculation approach to quantitative Auger electron spectroscopy
作者:
Shingo Ichimura,
Mikio Aratama,
Ryuichi Shimizu,
期刊:
Journal of Applied Physics
(AIP Available online 1980)
卷期:
Volume 51,
issue 5
页码: 2853-2860
ISSN:0021-8979
年代: 1980
DOI:10.1063/1.327953
出版商: AIP
数据来源: AIP
摘要:
A Monte Carlo calculation technique based on both the partial wave expansion method for elastic scattering and Krefting and Reimer’s treatment for inelastic scattering was applied for quantitative study by Auger electron spectroscopy. The theory has described the experiment of energy and angular distributions of backscattered electrons with considerable success. Dependence of the Auger signal generation on primary electron energy was investigated with a scanning Auger electron microscope, and the result was compared with the theory for a number of elements of practical interest. Through this, we have found that the present Monte Carlo approach allows us to evaluate contributions of backscattered electrons to Auger signal generation leading to more comprehensive quantitative AES study.
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