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Flexible‐diaphragm force microscope

 

作者: Paul Rice,   John Moreland,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1994）
卷期: Volume 12, issue 4  

页码: 2465-2466

 

ISSN:1071-1023

 

年代: 1994

 

DOI:10.1116/1.587785

 

出版商: American Vacuum Society

 

关键词: ATOMIC FORCE MICROSCOPY;DESIGN;MEMBRANES;POLYIMIDES;TUNNEL EFFECT;IMAGE FORMING

 

数据来源: AIP

 

摘要:

A flexible polyimide diaphragm was used in place of the usual cantilever for atomic force microscopy. Images of hard disk surface features are presented demonstrating the practicality of the method.

 

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