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Quantitative topographic imaging using a near-field scanning microwave microscope

 

作者: C. P. Vlahacos,   D. E. Steinhauer,   S. K. Dutta,   B. J. Feenstra,   Steven M. Anlage,   F. C. Wellstood,  

 

期刊: Applied Physics Letters  (AIP Available online 1998)
卷期: Volume 72, issue 14  

页码: 1778-1780

 

ISSN:0003-6951

 

年代: 1998

 

DOI:10.1063/1.121182

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We describe a technique for extracting topographic information using a scanning near-field microwave microscope. By monitoring the shift of the system’s resonant frequency, we obtain quantitative topographic images of uniformly conducting metal surfaces. At a frequency of 9.572 GHz, our technique allows a height discrimination of about 55 nm at a separation of 30 &mgr;m. We present topographic images of uneven, conducting samples and compare the height response and sensitivity of the system with theoretical expectations. ©1998 American Institute of Physics.

 

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