Quantitative topographic imaging using a near-field scanning microwave microscope
作者:
C. P. Vlahacos,
D. E. Steinhauer,
S. K. Dutta,
B. J. Feenstra,
Steven M. Anlage,
F. C. Wellstood,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 72,
issue 14
页码: 1778-1780
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.121182
出版商: AIP
数据来源: AIP
摘要:
We describe a technique for extracting topographic information using a scanning near-field microwave microscope. By monitoring the shift of the system’s resonant frequency, we obtain quantitative topographic images of uniformly conducting metal surfaces. At a frequency of 9.572 GHz, our technique allows a height discrimination of about 55 nm at a separation of 30 &mgr;m. We present topographic images of uneven, conducting samples and compare the height response and sensitivity of the system with theoretical expectations. ©1998 American Institute of Physics.
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