首页   按字顺浏览 期刊浏览 卷期浏览 Surface micromachined interferometer‐based optical reading technique
Surface micromachined interferometer‐based optical reading technique

 

作者: G. L. Christenson,   A. T. T. D. Tran,   S. A. Miller,   D. Haronian,   Y. H. Lo,   N. C. MacDonald,  

 

期刊: Applied Physics Letters  (AIP Available online 1996)
卷期: Volume 69, issue 22  

页码: 3324-3326

 

ISSN:0003-6951

 

年代: 1996

 

DOI:10.1063/1.117294

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A surface micromachined suspended interferometer and an atomic force microscope (AFM) are incorporated into a novel optical reading technique. The AFM tip mechanically deflects the suspended membrane as it scans past a data bit on the membrane surface. The data are read by monitoring the changing interference pattern generated in the optical aperture of the interferometer. When operated in parallel, there exists the potential for high speed, high density data reading. ©1996 American Institute of Physics.

 

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