Ultra‐shallow‐doped film requirements for future technologies
作者:
B. El‐Kareh,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1994)
卷期:
Volume 12,
issue 1
页码: 172-178
ISSN:1071-1023
年代: 1994
DOI:10.1116/1.587178
出版商: American Vacuum Society
关键词: THIN FILMS;DOPING PROFILES;PERFORMANCE;SIMULATION;MOSFET;MINIATURIZATION;GATES
数据来源: AIP
摘要:
The simulation, fabrication, and characterization of ultra‐shallow‐doped films are critical to optimizing sub‐half‐micron devices. This article describes key metal–oxide–semiconductor field effect transistor elements and their impact on device performance, emphasizing the need for ultra‐shallow‐doped films. Methods to achieve such small geometries are discussed. Future technology trends are projected. These trends are evolving at a fast pace, requiring improved simulation tools and novel measurement methods. Simulated structures are used to define device needs for abrupt composition profiles and to highlight the stringent requirements that are imposed on film characterization and model verification.
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