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New x‐ray limit measurements for extractor gauges

 

作者: Fumio Watanabe,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1991）
卷期: Volume 9, issue 5  

页码: 2744-2746

 

ISSN:0734-2101

 

年代: 1991

 

DOI:10.1116/1.577192

 

出版商: American Vacuum Society

 

关键词: VACUUM GAGES;PRESSURE MEASUREMENT;PHOTOEMISSION;X RADIATION;PERFORMANCE TESTING;ULTRAHIGH VACUUM

 

数据来源: AIP

 

摘要:

A new x‐ray limit measurement method for extractor gauges has been developed using modulation of the hemispherical ion reflector. The measurement is possible from pressures as high as the 10−8mbar range. X‐ray limits for commercial extractor gauges have been examined for various emission currents and different gauge port geometries. The scatter in the x‐ray limits measured is about 30% and the effect of gauge port geometry is more than 70%.

 

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